Scroll vacuum pumps
ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll vacuum pumps.
Have you ever seen our new scroll vacuum pump catalog? Take a look here.
ISP scroll vacuum pumps are compact and less noise/vibration emitting than other dry vacuum pumps. Highly valued by customers who need clean vacuum generation, especially in analytical and semiconductor related fields.
ISP scroll vacuum pumps offers a clean environment for its owner, so do not need care about waste oils and industrial water. There are a freedom of installation because of ISP air cooling system not required special connections and accessories.
ISP scroll vacuum pumps are suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances. Ambient operating temperature up to 40 degree celsius.
- Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
- Accelerator, Synchrotron Radiation
- Surface modification, Electron beam process
- Gas recovery devices
- Vacuum equipment
- Leak detectors
- Device handling system
- Vacuum furnace, Heat treatment furnace
- Laboratory use
- Vacuum packaging machine
ISP 50-90-250C-500C-1000 scroll vacuum pumps