Scroll vacuum pumps

Scroll vacuum pumps

scroll vacuum pumps

scroll vacuum pumps

ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll vacuum pumps.

Have you ever seen our new scroll vacuum pump catalog? Take a look here.

ISP scroll vacuum pumps are compact and less noise/vibration emitting than other dry vacuum pumps. Highly valued by customers who need clean vacuum generation, especially in analytical and semiconductor related fields.

ISP scroll vacuum pumps offers a clean environment for its owner, so do not need care about waste oils and industrial water. There are a freedom of installation because of ISP air cooling system not required special connections and accessories.

ISP scroll vacuum pumps are suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances. Ambient operating temperature up to 40 degree celsius.

Applications:

  • Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
  • Accelerator, Synchrotron Radiation
  • Surface modification, Electron beam process
  • Gas recovery devices
  • Vacuum equipment
  • Leak detectors
  • Device handling system
  • Vacuum furnace, Heat treatment furnace
  • Laboratory use
  • Vacuum packaging machine

Get a quote for ISP scroll vacuum pumps

 

ISP 50-90-250C-500C-1000 scroll vacuum pumps

 

ISP-500C

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9001500001

9001500001 ISP-50 3  1.5x10-1  0,1    48  25/16  -  12

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9001500002

9001500002 ISP-90 5 5x10-2 0,15    52  25/16  -  14

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9001500003

9001500003 ISP-250C 15 1.6x10-2  0,4    58  25/16  -  25

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9001500004

9001500004 ISP-500C 30 1x10-2  0,6    60  40/25  -  44

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9001500005

9001500005 ISP-1000 60 1x10-2  1,4    67  40/4  -  60

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